Amidst the rapid pace of technological innovation, we will continue to offer quality, reliable products, based on the technologies that we have cultivated, and contribute to a prosperous society.
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Vertical Heat Treatment Furnaces
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Vertical Heat Treatment Furnaces
DF1600
Vertical Heat Treatment Furnace
●Temperature increase rate:100 °C,
temperature decrease rate: 50 °C
●Small size with small footprint
(W 900 x H 2200 x D 1980)
●Compatible with mini-batches
●Compatible with 4 to 8 inch wafers
DF2600
Vertical Heat Treatment Furnace
●Apparatus height of 2600 mm
● Small size with small footprint
(W 900 x H 2600 x D 1280)
●Compatible with 4 to 8 inch wafers
●Compatible with high temperatures (1300°C)
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Industrial instrument
System Equipments
Recorders
Temperature Controllers
Thyristor Units
pH/Conductivity Meters
Signal Converters
Pressure Transmitters
Water Gauges
Mass Flow Controllers
Microvalves
System Examples
Semiconductor Equipment
Horizontal Heat Treatment Furnaces
Vertical Heat Treatment Furnaces
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